Ceramic Pyroelectric Detectors (CPM)
Micro-Hybrid designs pyroelectric detectors based on a proprietary MEMS based technology. Their pyroelectric element consists of a thin CPM film (Ceramic Pyroelectrical Material) applied to a modified silicon-based membrane which is produced using a DRIE back-etch process. The active area covers a broad range of IR wavelengths between 2 µm and 15 μm, while the front electrode consists of optically transparent materials to let the infrared radiation pass to the active area. Their response peaks are at 30 Hz and drop off at lower frequencies.
